ČSN EN IEC 63616   (353013) Měření vodivosti kovových tenkých vrstev při mikrovlnných a milimetrových vlnových frekvencích - Metoda vyváženého kruhového diskového rezonátoru

Anotace textu normy ČSN EN IEC 63616   (353013)

This document relates to a conductivity measurement method of thin metal films at microwave and millimeter-wave frequencies. This method has been developed to evaluate the conductivity of a metal foil used for adhering to a substrate or the interfacial conductivity of a metal layer formed on a dielectric substrate. It uses higher-order modes of a balanced-type circular disk resonator and provides broadband conductivity measurements by using a single resonator.

In comparison with the conventional method described in IEC 61788 7 [1] , this method has the following characteristics:

- the value of the conductivity of a metal foil can be measured accurately and non destructively,

- the value of the interfacial conductivity of a metal layer on a dielectric substrate can be measured accurately and non-destructively,

- this method presents broadband measurements by using higher-order modes by one resonator,

- this method is applicable for the measurements under the following conditions:

- frequency: 10 GHz 170 GHz,

- conductivity: 105 S/m 108 S/m.